6-axis robot for semiconductors
Super cleanroom compatible high-precision 6-axis robot
Robots required for semiconductor applications, which necessitate a delicate process, must not only be suitable for super cleanroom environments but also possess high reliability and precision to achieve high productivity. The TX2 SCR series has a proven track record in carrier transport and wafer and mask processes in super cleanrooms.
- Company:ストーブリ
- Price:Other